Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Rovibronic cross sections for the excitation of various rotational and vibrational levels of N2 by electron impact for scattering energies in the range of 1-4 eV have been calculated in the framework of the R-matrix approach. The new non-adiabatic phase matrix method (NADP) is employed for the nuclear vibrations. The results are compared with experiment and with other theoretical data and are found to be in excellent agreement with measurements in the energy region of the 2Πg shape resonance.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Michiel Sprik
Journal of Physics Condensed Matter