VLS-grown silicon nanowire tunnel FET
K. Moselund, H. Ghoneim, et al.
DRC 2009
A technique is presented by which one can construct a micrometer-scale, two-electrode, electrostatic lens using readily available supplies and a relatively steady hand. The first-aperture diameter can range from several hundred ångströms to several micrometers, and the second aperture is 20 μm in diameter; the space between the electrodes is 8 μm. A method for extending the technique to lenses of three (or more) electrodes is described. Potential differences of over 500 V have been applied to the electrodes without breakdown. The capacity of the lenses to send an electron beam through crossover with relatively low distortion has been demonstrated. © 1993.
K. Moselund, H. Ghoneim, et al.
DRC 2009
H. Schmid, Hans-Werner Fink, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Bernard, E. Delamarche, et al.
Langmuir
Bruno Michel, A. Bernard, et al.
IBM J. Res. Dev