Spin-on organic hardmask for topo-patterned substrate
Kazuhiko Komura, Yoshi Hishiro, et al.
SPIE Advanced Lithography 2014
A method of producing a bit-patterned media on a flexible substrate using a low-cost, hot nanoimprinting process is investigated. Using a topographic master with features as small as 40 nm, a flexible plastic substrate is patterned with high fidelity. Magnetic material is sputter-deposited onto the patterned substrate to produce a magnetic tape media with densities as high as 100 Gigadot/in2. Magnetic recording characteristics of the coated bit-patterned tape is evaluated in an apparatus which slides a recording head on the media with a high-resolution positioning capability.
Kazuhiko Komura, Yoshi Hishiro, et al.
SPIE Advanced Lithography 2014
Olivier Coulembier, Armin Knoll, et al.
Macromolecules
Jun-Fu Liu, Sylvain Cruchon-Dupeyrat, et al.
Nano Letters
Bernd Gotsmann, Urs Duerig, et al.
Advanced Functional Materials