Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Ronen Feldman, Martin Charles Golumbic
Ann. Math. Artif. Intell.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990