Timothy A. Brunner, Nakgeuon Seong, et al.
Journal of Microlithography, Microfabrication and Microsystems
A pair of piano-aspheric lenses can be used to transform a collimated, radially symmetric, Gaussian beam to a radially symmetric flat-top beam. Diffraction of the output beam due to the choice of irradiance profile, as well as the finite aperture of the optics, must be considered if a propagating beam is required. Choosing both lenses to be positive, one can show that the aspheric surfaces are strictly convex, which facilitates fabrication by magnetorheological figuring. A fused silica lens pair is demonstrated, which can be used at any wavelength from 250 to 1550 nm to transform a Gaussian to a flat-top beam. Measurements of both the irradiance profile and phase of the output beam are presented and compared to the ideal design. These optics transform 78% of the total input beam power into the flat-top region of the output beam, which is uniform to better than 5% rms. For applications requiring uniform illumination, this represents a fourfold improvement in power utilization over the Gaussian input. The output wavefront is flat to a quarter wave at 514 nm, resulting in a beam that propagates approximately 0.5 m without Significant change in profile. © 2003 Society of Photo-Optical Instrumentation Engineers.
Timothy A. Brunner, Nakgeuon Seong, et al.
Journal of Microlithography, Microfabrication and Microsystems
John A. Hoffnagle, William D. Hinsberg, et al.
J. Photopolym. Sci. Tech.
Todd L. Harris, Mingzhen Tian, et al.
Journal of the Optical Society of America B: Optical Physics
Geoffrey W. Burr, Hans Coufal, et al.
OC 2001