Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using the technique of energy-distribution analysis of photoemitted electrons, we have accurately located the position of several band-structure features of InP, including the next higher conduction-band minimum above the Γ1 minimum at 1.95 eV above the valence-band maximum, independent of temperature. This minimum is tentatively associated with the L1 symmetry point. High-temperature Hall-effect measurements confirm that there are no minima between the lowest two observed by photoemission. A band structure for InP has been computed using these new data in an empirically adjusted first-principles orthogonalized-plane-wave (OPW) calculation. The velocity-field characteristic has been calculated for a range of lattice temperatures. A negative differential mobility is predicted, with a room-temperature threshold field of 11 500 V/cm and a peak drift velocity of 3×107 cm/sec. © 1970 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Krol, C.J. Sher, et al.
Surface Science
Robert W. Keyes
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989