E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The atomic structure of the Al–Si epitaxial interface has been investigated by high-resolution transmission electron microscopy combined with computer image-simulation techniques. A stable epitaxial structure was observed at the Al(111)–Si(111) interface with a matching of four Al to three Si lattice planes, corresponding to a misfit of 30%. The formation of an epitaxial interface with such a large misfit is unexpected and its Occurrence can be attributed to the optimum energy of this interface. Atomic models consistent with these observations are proposed. © 1986 Taylor & Francis Group, LLC.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Krol, C.J. Sher, et al.
Surface Science
Lawrence Suchow, Norman R. Stemple
JES