Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We consider a single server at which customers of several classes arrive according to a stochastic point process and the server may take vacations arbitrarily. We show that under stationary conditions, the ASTA property (Arrivals See Time Averages) implies an M/G/1-like load decomposition property. A network of quasi-reversible symmetric queues with server vacations is given as an example for non-Poisson arrivals. © 1991.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics
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VTC Spring 2007
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Proceedings of SPIE - The International Society for Optical Engineering