Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
This paper is concerned with the approximation of functions by linear combinations of multivariate B-splines. We construct and analyze local linear approximation schemes on certain uniform configurations. Furthermore we point out how these uniform configurations may be refined locally while still preserving the desired global smoothness of the splines. © 1981.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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BMC Bioinformatics
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Journal of Biomedical Informatics
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SPIE Advances in Semiconductors and Superconductors 1990