T. Schneider, E. Stoll
Physical Review B
No abstract available.
T. Schneider, E. Stoll
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
Frank Stem
C R C Critical Reviews in Solid State Sciences