Application of Triangular Voltage Sweep Method to Mobile Charge Studies in MOS Structures

The present paper examines the theoretical aspects of the triangular voltage sweep (TVS) technique and describes the development of a unified quasi-equilibrium approach wherein various polarization processes in an MOS capacitor structure subjected to the changing applied field are evaluated in terms of their contributions to the externally observed current. It is shown that a self-consistent experimental and analytical approach must be used when the TVS technique is applied to mobile charge studies in MOS structures. © 1971, The Electrochemical Society, Inc. All rights reserved.