Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Complex materials processing simulation not only requires a generalized flow solver (2D and 3D) for flow and energy equation with special treatment for free and moving interface, but also a robust adaptive mesh (grid) generation scheme particularly suitable for moving boundary problems. A systematic approach to develop efficient computational and numerical algorithms presented here can significantly enhance our ability to analyze/simulate a wide variety of materials processing applications. Proper validation of the algorithms and solution paradigms for a wide variety of application problems like solidification in a rectangular cavity and low and high pressure Czochralski crystal growth are carried out to demonstrate the applicability of the CAGGM procedure.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010