PaperDependence of pattern dimensions on proximity functions in electron beam lithographyMihir ParikhJournal of Applied Physics
PaperCalculation of dissociative ionization cross sections of diatomic moleculesMihir ParikhPhysical Review A
PaperEnergy deposition functions in electron resist films on substratesMihir Parikh, David F. KyserJournal of Applied Physics
PaperCorrections to proximity effects in electron beam lithography. II. ImplementationMihir ParikhJournal of Applied Physics