Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
This paper describes a new computational method of fully automated anisotropic triangulation of a trimmed parametric surface. Given as input: (1) a domain geometry and (2) a 3 × 3 tensor field that specifies a desired anisotropic node-spacing, this new approach first packs ellipsoids closely in the domain by defining proximity-based interacting forces among the ellipsoids and finding a force-balancing configuration using dynamic simulation. The centers of the ellipsoids are then connected by anisotropic Delaunay triangulation for a complete mesh topology. Since a specified tensor field controls the directions and the lengths of the ellipsoids' principal axes, the method generates a graded anisotropic mesh whose elements conform precisely to the given tensor field.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
M. Tismenetsky
International Journal of Computer Mathematics
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence