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SPIE Photomask Technology + EUV Lithography 2011
This paper is concerned with the statistical analysis of first-order linear distributed-parameter systems with random parameters and random inputs. In both cases, Gaussian processes are assumed. This work essentially extends the statistical theory available for analyzing random linear lumped-parameter systems to a restricted class of distributed-parameter systems. © 1963.
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SPIE Photomask Technology + EUV Lithography 2011
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