Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
The channel rectilinear Steiner tree problem is to construct an optimal rectilinear Steiner tree interconnecting n terminals on the upper shore and the lower shore of a channel without crossing any obstacles inside the channel. However, intersecting boundaries of obstacles is allowed. We present an algorithm that computes an optimal channel rectilinear Steiner tree in O(F1(k)n + F2(k)) time, where k is the number of obstacles inside the channel and F1 and F2 are exponential functions of k. For any constant k the proposed algorithm runs in O(n) time. Copyright © 1991 John Wiley & Sons, Ltd.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Chai Wah Wu
Linear Algebra and Its Applications
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Charles Chiang, Majid Sarrafzadeh, et al.
IEEE Transactions on Circuits and Systems I: Fundamental Theory and Applications