Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The well-known Baum-Eagon ineauality 131 provides an effective iterative scheme for finding a local maximum for homogeneous polynomials with positive coefficients over a domain of probability values. However, in many applications we are interested in maximizing a general rational function. We extend the Baum-Eagon inequality to rational functions. We briefly describe some of the applications of this inequality to statistical estimation problems. © 1991 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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