Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We show how to replace the point functional of numerical analysis with types of stable functional of highly oscillatory solutions of differential equations. This replacement leads to the development of effective numerical methods for the stiff highly oscillatory problem. © 1976, American Mathematical Society.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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Journal of Biomedical Informatics
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SPIE Photomask Technology + EUV Lithography 2009
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