Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
An algorithm is presented which reduces the moment of inertia of a system interaction matrix by applying a sequence of permutation transformations. The algorithm is shown to have certain finite convergence properties. The application of the technique to several system matrices is discussed with a view to revealing some of the latent structure within the model. © 1976.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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