Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
An algorithm is presented which reduces the moment of inertia of a system interaction matrix by applying a sequence of permutation transformations. The algorithm is shown to have certain finite convergence properties. The application of the technique to several system matrices is discussed with a view to revealing some of the latent structure within the model. © 1976.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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SPIE Photomask Technology + EUV Lithography 2007
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