Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Indranil R. Bardhan, Sugato Bagchi, et al.
JMIS
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking