Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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The emergence of new nonvolatile memory (NVM) technologies - such as phase change memory, resistive, and spin-torque-transfer magnetic RAM - has been motivated by exciting applications such as storage class memory, embedded nonvolatile memory, enhanced solid-state disks, and neuromorphic computing. Many of these applications call for such NVM devices to be packed densely in vast ".
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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J. Photopolym. Sci. Tech.
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Physica A: Statistical Mechanics and its Applications