Wu Lu, Almaz Kuliev, et al.
IEEE Transactions on Electron Devices
We report absolute removal rate constants for silylene by reaction with alkanes, olefins, 1,3-butadiene, and acetylene at ambient temperature and 5-Torr total pressure. Rate constants were determined by laser resonance absorption flash kinetic spectroscopy. The results show that silylene is unreactive with alkanes and reacts rapidly and unselectively with unsaturated hydrocarbons. © 1987 American Chemical Society.
Wu Lu, Almaz Kuliev, et al.
IEEE Transactions on Electron Devices
Joseph M. Jasinski, Jack O. Chu
The Journal of Chemical Physics
Wu Lu, Steven J. Koester, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Kazuya Ohuchi, Christian Lavoie, et al.
IWJT 2008