Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The temperature dependence (30K>T>400 mK) and magnetic field dependence (H<50 kG) of hopping conduction have been measured as a function of impurity concentration and surface electric field in a quasi-two-dimensional impurity band formed in the inversion layer of a sodium-doped Si metal-oxide-semiconductor field-effect transistor. We find that our observations can be accommodated by noninteracting, single-particle hopping models based on percolation theory in which the effect of Coulomb interactions between electrons on different sites is ignored. Our observations are not consistent with the existence of a Coulomb gap in the single-particle excitation spectrum, although the gap was expected to determine the conductivity under the conditions examined in these experiments. © 1986 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009