Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The article describes some prevailing thoughts and an approach to the development of molecular circuit elements for molecular electronics. Three basic principles are proposed and exemplified by a particular example of a suitable molecule. The model relies upon the current state of the art in science and technology. © 1993, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
K.N. Tu
Materials Science and Engineering: A
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Technical Digest-International Electron Devices Meeting