A. Krol, C.J. Sher, et al.
Surface Science
For measuring nanoscale displacements, air/vacuum tunnelling is the most sensitive method. However, the alignment mechanism is difficult to scale down for integrated devices. Here, we present a tunnelling displacement sensor based on a squeezable molecular bilayer, which was built from two stacked self-assembled monolayers of mercaptohexadecanoic acid. The bilayer provides an inherent vertical alignment between the tunnelling electrodes. Squeezing of the bilayer leads to an exponential change in the tunnel current. Nanometre displacement sensitivity was achieved. © 2006 IOP Publishing Ltd.
A. Krol, C.J. Sher, et al.
Surface Science
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
A. Gangulee, F.M. D'Heurle
Thin Solid Films