L. Dori, J. Bruley, et al.
Journal of Applied Physics
This paper illustrates a smart sensor system for carbon monoxide detection. An innovative technological approach has been pursued to fabricate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface processes the outputs of three sensors to compensate relative humidity and interfering gases. Sigma-delta signal processing and low-frequency noise reduction techniques are used to minimize silicon area and to meet the required performance in a standard CMOS technology.
L. Dori, J. Bruley, et al.
Journal of Applied Physics
J.Y.-C. Sun, M. Arienzo, et al.
ESSDERC 1987
D.A. Buchanan, A.D. Marwick, et al.
Journal of Applied Physics
P. Maccagnani, R. Angelucci, et al.
Sensors and Actuators, B: Chemical