Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
High density arrays of chromium (Cr) and layered gold/chromium (Au/Cr) nanodots and nanoholes in metal films were fabricated by evaporation onto nanoporous templates produced by the self-assembly of poly(styrene-b-methyl methacrylate) (P(S-b-MMA)) diblock copolymers. The cylindrical microdomains of the asymmetric block copolymer were oriented normal to the surface by balancing interfacial interactions of the blocks with the substrate. By selectively removing either the minor or major component, nanoporous films of PS or nanoscopic posts of PS could be produced. Thus, a template, comprising an array of hexagonally packed pores in a PS matrix or PS posts, was easily fabricated. Evaporation of Cr and Au onto the template, followed by sonication and UV degradation of the PS, left Cr or Au/Cr nanodots or a nanoporous metallic film.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids