Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
In this study we consider adaptive mesh refinement for the solution of Maxwell's equations in the quasi-static or diffusion regime. We propose a new finite volume OcTree discretization for the problem and show how to construct second order stencils on Yee grids, extending the known first order discretization stencils. We then develop an effective preconditioner to the problem. We show that our preconditioner performs well for discontinuous conductivities as well as for a wide range of frequencies. © 2011 Society for Industrial and Applied Mathematics.
J. LaRue, C. Ting
Proceedings of SPIE 1989
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Sankar Basu
Journal of the Franklin Institute
Yi Zhou, Parikshit Ram, et al.
ICLR 2023