Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
We discuss some aspects of our high pressure, room temperature, Raman measurements on the ferroelectric PbTiO3.Particular emphasis is placed on the soft modes, their damping, and their behavior near the phase transition to the cubic centrosymmetric structure. © 1983, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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