Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We relate a particular version of a parallel multigrid method to a domain decomposition method, showing that the parallel multigrid method reduces computation to a small portion of the domain and then extends the solution to the entire domain using the correct reflections to get the exact solution. We extend a particular example to double the parallelism in a nonobvious manner. While the techniques of this paper are applied to twodimensional problems, they can be applied to higher dimensional problems in an obvious manner. Copyright © 1989 Wiley Periodicals, Inc.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Andrew Skumanich
SPIE Optics Quebec 1993
Guillaume Buthmann, Tomoya Sakai, et al.
ICASSP 2025
J. LaRue, C. Ting
Proceedings of SPIE 1989