Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We relate a particular version of a parallel multigrid method to a domain decomposition method, showing that the parallel multigrid method reduces computation to a small portion of the domain and then extends the solution to the entire domain using the correct reflections to get the exact solution. We extend a particular example to double the parallelism in a nonobvious manner. While the techniques of this paper are applied to twodimensional problems, they can be applied to higher dimensional problems in an obvious manner. Copyright © 1989 Wiley Periodicals, Inc.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Igor Devetak, Andreas Winter
ISIT 2003