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Modeling polarization for Hyper-NA lithography tools and masks
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A table of binary constant weight codes of length n < 28 is presented. Explicit constructions are given for most of the 600 codes in the table; the majority of these codes are new. The known techniques for constructing constant weight codes are surveyed, and also a table is given of (unrestricted) binary codes of length n ≤ 28. © 1990 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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