Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
J. Tersoff
Applied Surface Science
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering