Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
No abstract available.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
M. Tismenetsky
International Journal of Computer Mathematics