A high-vacuum triple-axis-diffractometer for soft X-ray scattering experiments

We present the design of a diffractometer for diffraction and reflection experiments with soft X-rays. The main part of this instrument is a triple-axis-diffractometer consisting of three one-circle-goniometers which are all mounted on a single 14 in. o.d. vacuum flange. The goniometers with their stepper motors are operated in high vacuum ({reversed tilde equals}1 × 10-6 Torr). The performance of the instrument is demonstrated by diffraction experiments using 7.95 Å (1.56 keV) synchrotron radiation. Results are presented for cadmium arachidate Langmuir-Blodgett multilayer films on a quartz substrate. © 1988.