Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
This paper presents a general technique to determine the dynamic response of a plate excited by an orbiting mass. The technique relies on a finite element discretization in which the mesh is consistent with the trajectory of the orbiting mass, combined with a Lagrange multiplier formulation. This allows one to represent the compatibility condition at the mass-plate interface using a set of auxiliary functions. This technique can be applied to plates of any shape, excited by masses describing any type of trajectory. An example is presented to illustrate the method. © 1991.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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MRS Fall Meeting 2020
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Micro and Nano Engineering
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