Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Simeon Furrer, Dirk Dahlhaus
ISIT 2005
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Naga Ayachitula, Melissa Buco, et al.
SCC 2007