Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.
Charles A Micchelli
Journal of Approximation Theory
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997