Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
A fast algorithm for division by constant divisors is presented. The method has proved very useful implemented as microcode on a binary machine, and can be adapted directly into hardware. The mathematical foundations of the algorithm are presented as well as some performance measures. © 1976, ACM. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert C. Durbeck
IEEE TACON
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