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SPIE Advanced Lithography 2008
The photothermal deflection technique has been extended as a contactless method to investigate thermal transport in thin films. A theoretical model is developed which quantitatively describes the transport behavior, and is shown to be in excellent agreement with experimental results. This approach yields the thermal diffusivity directly and in a spatially-resolved manner. © 1987 Springer-Verlag.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
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Materials Research Society Symposium - Proceedings
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Proceedings of SPIE 1989