William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Ziv Bar-Yossef, T.S. Jayram, et al.
Journal of Computer and System Sciences
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009