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Photomask and Next-Generation Lithography Mask Technology 2004
In order to eliminate the dead time of an audio frequency square wave inductively pumped argon laser, a 1 µs rise time square wave inverter capable of switching 150 volts and 18 amperes has been built. This 3 kW unit can be operated at an adjustable fundamental frequency from 2.5 to 25 kHz. Copyright © 1970 by The Institute of Electrical and Electronics Engineers, Inc.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Thomas M. Cheng
IT Professional
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SPIE Optical Science, Engineering, and Instrumentation 1998
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