R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
No abstract available.
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
T.N. Morgan
Semiconductor Science and Technology