Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
No abstract available.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
R.W. Gammon, E. Courtens, et al.
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering